Mussabek, G., Dikhanbayev К., Sivakov, V., Talkenberg, F., Sailaubek, S., Djunusbekov А., Ukenova, G. and Kemelbekova А. 2016. Aluminum doped zinc oxide layers by atomic layer deposition and magnetron sputtering: formation and comparison of optoelectronic properties. Physical Sciences and Technology. 2, 1 (Oct. 2016). DOI:https://doi.org/10.26577/2409-6121-2015-2-1-18-23.