Nussupov, K. K., Beisenkhanov, N. B., Seitov, B. Z., Bakranova, D. I., & Keyinbay, S. (2019). The formation of SiC films by magnetron sputtering. Physical Sciences and Technology, 5(3-4), 23–28. https://doi.org/10.26577/phst-2018-2-154