Mussabek, G., Dikhanbayev К., Sivakov, V., Talkenberg, F., Sailaubek, S., Djunusbekov А., Ukenova, G., & Kemelbekova А. (2016). Aluminum doped zinc oxide layers by atomic layer deposition and magnetron sputtering: formation and comparison of optoelectronic properties. Physical Sciences and Technology, 2(1). https://doi.org/10.26577/2409-6121-2015-2-1-18-23