NUSSUPOV, K. K.; BEISENKHANOV, N. B.; SEITOV, B. Z.; BAKRANOVA, D. I.; KEYINBAY, S. The formation of SiC films by magnetron sputtering. Physical Sciences and Technology, [S. l.], v. 5, n. 3-4, p. 23–28, 2019. DOI: 10.26577/phst-2018-2-154. Disponível em: https://phst.kaznu.kz/index.php/journal/article/view/154. Acesso em: 24 nov. 2024.