MURZALINOV, D.; VLASUKOVA, L.; PARKHOMENKO, I.; KOMAROV, F.; AKILBEKOV, A. Ion-beam formation of light-emitting structures based on silicon nitride layers on silicon. Physical Sciences and Technology, [S. l.], v. 5, n. 3-4, p. 29–36, 2019. DOI: 10.26577/phst-2018-2-155. Disponível em: https://phst.kaznu.kz/index.php/journal/article/view/155. Acesso em: 23 nov. 2024.