BELAROUCI, A.; TKACH, R.; AVERIN, D. Engineering high aspect-ratio silicon nanostructures. Physical Sciences and Technology, [S. l.], v. 10, n. 3-4, p. 87–94, 2023. DOI: 10.26577/phst.2023.v10.i2.011. Disponível em: https://phst.kaznu.kz/index.php/journal/article/view/344. Acesso em: 3 jul. 2024.