Mussabek, G.K., Dikhanbayev К.К., V. Sivakov, F. Talkenberg, S. Sailaubek, Djunusbekov А.S., G.Ye. Ukenova, and Kemelbekova А.Ye. 2016. “Aluminum Doped Zinc Oxide Layers by Atomic Layer Deposition and Magnetron Sputtering: Formation and Comparison of Optoelectronic Properties”. Physical Sciences and Technology 2 (1). https://doi.org/10.26577/2409-6121-2015-2-1-18-23.