Nussupov, K. K., Beisenkhanov, N. B., Seitov, B. Z., Bakranova, D. I. and Keyinbay, S. (2019) “The formation of SiC films by magnetron sputtering”, Physical Sciences and Technology, 5(3-4), pp. 23–28. doi: 10.26577/phst-2018-2-154.