Murzalinov, D., L. Vlasukova, I. Parkhomenko, F. Komarov, and A. Akilbekov. “Ion-Beam Formation of Light-Emitting Structures Based on Silicon Nitride Layers on Silicon”. Physical Sciences and Technology, vol. 5, no. 3-4, Jan. 2019, pp. 29-36, doi:10.26577/phst-2018-2-155.