Nussupov, K. Kh., N. B. Beisenkhanov, B. Zh. Seitov, D. I. Bakranova, and S. Keyinbay. “The Formation of SiC Films by Magnetron Sputtering”. Physical Sciences and Technology 5, no. 3-4 (January 5, 2019): 23–28. Accessed July 3, 2024. https://phst.kaznu.kz/index.php/journal/article/view/154.